Browsing by Author "Gür, Emre"
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Characterization of multilayer Al doping in ZnO
Şenadım Tüzemen, Ebru; Muğlu, Günay Merhan; Alaydın, Behçet Özgür; Altun, Didem; Kılıç Çetin, Selda; Gür, Emre (2021)ZnO, ZnO/Al, Al/ZnO/Al, and ZnO/Al/ZnO samples were deposited on c-plane sapphire and Si substrates by radio frequency magnetron sputtering (RFMS) using ZnO target. In order to form doped ZnO:Al thin films, these grown ... -
Gallium oxide films deposition by RF magnetron sputtering; a detailed analysis on the effects of deposition pressure and sputtering power and annealing
Mobtakeri, Soheil; Akaltun, Yunus; Özer, Ali; Kılıç, Merhan; Şenadım Tüzemen, Ebru; Gür, Emre (2021)In this study, gallium oxide (Ga2O3) thin films were deposited on sapphire and n-Si substrates using Ga2O3 target by radio frequency magnetron sputtering (RFMS) at substrate temperature of 300 ◦C at variable RF power ...